Surface elasticity and elastic properties of thin films at GHOST laboratory

List of publications

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2000-present

§  Giovanni Carlotti, “Elastic Characterization of Transparent and Opaque Films, Multilayers and Acoustic Resonators by Surface Brillouin Light Scattering: A Review”,  Applied Sciences 8, 124 (2018) ; Review Article, Open Acces: http://www.mdpi.com/2076-3417/8/1/124/pdf

§  Giovanni Carlotti, Jyothi Sadhu and Fabien Dumont, “Dependence of the different elastic constants of ScAlN films on Sc content: a Brillouin scattering study with polarization analysis”, Proc. of the IEEE International Ultrasonics Symposium 2017, (PDF file, 423 KB) 

 

§  E. Roberti, G. Carlotti, S. Cinelli, G. Onori, A. Donnadio, R. Narducci, M. Casciola and M. Sganappa "Measurement of the Young’s modulus of Nafion membranes by Brillouin light scattering", J. Power Sources  195, 7761-7764 (2010) (PDF file, 327 KB) 

§  A. Tarre, G. Carlotti, A. Gerst, H. Mändar, A. Niilisk, V. Sammelselg, G. Socino and A. Rosental,  "C-plane chromia on c-plane sapphire",  Physica Status Solidi C 6, 1472-1475 (2009)  (PDF file, 257 KB) 

§        F. Iacopi, G. Beyer, Y. Travaly, C. Waldfried, D.M. Gage, R.H. Dauskardt, K. Houthoofd, P. Jacobs, P. Adriaensens, K. Schulze, S.E. Schulz, S. List and G. Carlotti, “Thermomechanical properties of thin organosilicate glass films treated with ultraviolet-assisted cure” , Acta Materialia 55, 1407-1414 (2007) (PDF file, 293 KB) 

§  F. Ciaramella, V. Jousseaume, M. Verdier, G. Carlotti, G. Socino, S. Maitrejean, A. Zenasni, Ch. Le Cornec and G.Passemard, ”Elastic properties measurements of porous ULK : a comparison between Nanoindentation and Brillouin light scattering”,  2006 MRS Spring Meeting , San Francisco (abstract only).  

§  F.Iacopi, G.Beyer, K.Houthoofd, P.Adriaensens, C.Waldfried, S.Demuynck, Y.Travaly, S.Eslava-Fernandez, D.M.Gage, S.Giangrandi, K.Schulz, S.Schulze, G.Carlotti, R.H.Dauskardt, ”Matrix structure of organo-silicate glasses and thermo-mechanical properties of thin low-k films”, 2006 MRS Spring Meeting, San Francisco (abstract only).

§    F. Iacopi, S.H.Brongersma, A.Mazurenko, G.Carlotti and K.Maex, "Perspectives on the characterization of thin soft films with acoustic techniques".   Proceedings of the twelfth International Conference on Composites nano-engineering (ICCE - 12), Tenerife, 2005. (PDF file, 272 KB)

§  F.Iacopi, C.Waldfried, K.Houthoofd, E.P.Guyer, D.M.Gage, G.Carlotti, Y.Travaly, T.Abell, O.Escorcia, G.Beyer, I.Berry, R.H.Dauskardt and K.Maex, "UV –assisted curing: an effective technique for toughening low-k organosilicate films", Proccedings of the Advanced Metallization Conference (AMC), Colorado Springs, 2005. (PDF file, 279 KB) 

§  N. Chérault, G. Carlotti, N. Casanova, P. Gergaud, C. Goldberg, O. Thomas, M. Verdier, "Mechanical characterization of low-k and barrier dielectric thin films", Microelectronic Engineering  82,  368-373  (2005)   (PDF file, 185 KB)

§  G. Carlotti, N. Chérault, N. Casanova, C. Goldberg, and G. Socino, "Elastic constants of new low-k and barrier dielectric films measured by Brillouin light scattering",  Thin Solid Films, 493, 175-178 (2005)  (PDF file, 110 KB)

§  V. Senez, A. Armigliato, G. Carlotti, G. Carnevale, H. Jaouen, I. De Wolf, "Stress engineering in Si-based microstructures using technology computer-aided design", IEICE Transactions on Electronics E86C, 284-294 (2003) (PDF file, 3003 KB)

§        G. Carlotti, P. Colpani, D. Piccolo,   S. Santucci, V. Senez, G. Socino, L. Verdini, "Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics", Thin Solid Films  414, 99-104 (2002) (PDF file, 145 KB)

§  V. Senez, A. Armigliato, G. Carlotti, G. Carnevale, H. Jaouen, I. De Wolf, "Finite element analysis of stress evolution in Si based front and back ends micro structures " : Proceedings of the Int. Conf. on Simulations of Semiconductor Processes and Devices, SISPAD 2002, pp: 247 - 252 (PDF file, 385 KB)

§        L. Valentini, J.M. Kenny, G. Mariotto, P. Tosi, G. Carlotti, D. Fioretto, M. Renzetti, and S. Santucci, “Ar dilution effects on the elastic and structural properties of hydrogenated hard carbon films deposited by plasma enhanced chemical vapour deposition”,  Diamond and Related Materials 10,  1042 (2001). (PDF file, 113 KB)

§        L. Valentini, J.M. Kenny, G. Mariotto, P. Tosi, G. Carlotti, G. Socino, L. Lozzi, and S. Santucci,“Structural, morphological, and mechanical properties of plasma deposited hydrogenated amorphous carbon thin films: noble gas dilution effects” J. of Vac. Sci. Technol. A 19, 1619 (2001). (PDF file, 211 KB)

§        L. Valentini, J. M. Kenny, G. Carlotti, M. Guerrieri, G. Signorelli, L. Lozzi, and S. Santucci, Effect of Nitrogen Addition on the Elastic and Structural Properties of Amorphous Carbon Nitride Thin Films”, Thin Solid Films 389/1-2, p. 315 (2001). (PDF file, 145 KB)

§        L. Valentini, J.M. Kenny, G. Carlotti, G. Socino, L. Lozzi, and S. Santucci,“Ar dilution effects on the elastic properties of hydrogenated amorphous hard-carbon films grown by plasma enhanced chemical vapour deposition”, J. Appl. Phys. 89, p. 1003 (2001) (PDF file, 73 KB)

§        L. Valentini, J.M. Kenny, G. Carlotti, G. Socino, G. Signorelli, L. Lozzi  and S. Santucci, Brillouin scattering study of the elastic properties of  amorphous carbon nitride films, Proc. of the Internation Congress on Acoustics, Rome, sept. 2001.

§        Giovanni Carlotti, Paolo Colpani, Donata Piccolo, Sandro Santucci, Vincent Senez , Giovanni Socino and LivioVerdini,,"Elastic properties of silicate glass and silicon nitride films for submicron electronic devices", Proc. of  the Internation Congress on Acoustics, Rome, sept. 2001.

 

1996-2000

Ø      V. Panella, G. Carlotti, G. Socino, L. Giovannini, M. Eddrief, and C. Sébenne, "Elastic properties of GaSe films epitaxially grown on the Si(111) 1x1-H surface, studied by Brillouin scattering", J. Phys. C 11, 6661 (1999) (file PDF, 103KB)

Ø      G. Carlotti, G. Gubbiotti, F.S. Hickernell, H.M. Liaw and G. Socino, "Comparative Study of the Elastic Properties of Polycrystalline Aluminum Nitride Films on SIlicon by Brillouin Light Scattering", Thin Solid Films 310, 34-38 (1997). (file PDF;145KB)

Ø      V. Panella, G. Carlotti and G. Socino, L. Giovannini, M. Eddrief , K. Amimer and C. Sébenne, "Brillouin Scattering Study of Epitaxial InSe Films Grown on the Si(111)1x1-H Surface", J. Phys. Cond. Matter. 9, 5575-5580 (1997) (file PDF, 84KB)

Ø      G. Carlotti and L. Doucet, "Elastic properties od silicon dioxide films deposited by chemical vapour deposition from tetraethylorthosilicate", Thin Solid Films 296, 102-105 (1997). (PDF file, 334 KB)

Ø      G. Carlotti, L. Doucet, "Comparative study of the elastic properties of silicate glass films grown by plasma enhanced chemical vapour deposition", J. Vac. Sci. Technol. 14, 3460-3464 (1996) (file PDF,112KB)   

Ø      G. Carlotti, D. Fioretto, L. Palmieri, G. Socino, A. Verdini and C. Rigo, "A Brillouin light scattering study of the elastic properties of chemical beam epitaxy grown In0.5Ga0.5As/InP superlattices", J. Phys. Condens. Matter 8, 2265-2272 (1996) (file PDF,129KB)

Ø      G. Carlotti, L. Palmieri, G. Socino, A. Verdini and L. Verdini and C. Rigo "Brillouin light spectroscopy of surface phonons in semiconductor heterostructures", in "Highlights of light spectroscopy on semiconductors", edited by A. D'Andrea, L.G. Quagliano and S. Selci (World Scientific, Singapore, 1996), p.171-174 (PDF file, 1085 KB)

 

1994-1995

Ø      G. Carlotti, F.S. Hickernell, H. M. Liaw, L. Palmieri, G. Socino and E. Verona, "The elastic constants of sputtered aluminum nitride films", 1995 IEEE Ultrasonics Symp. Proc., 353-356 (1995)

Ø      D. Fioretto, G. Carlotti, G. Socino, S. Modesti, C. Cepek, L. Giovannini, O. Donzelli and F. Nizzoli, "Brillouin scattering determination of the elastic constants of epitaxial fcc C60 film", Phys. Rev. B 52, R8707-R8710 (1995) (file PDF, 766 KB)

Ø      G. Carlotti, D. Fioretto G. Socino, Hua Xia , An Hu and S. S. Jiang, "Brillouin light scattering investigation of the elastic properties of Ta/Al metallic superlattices", Mater. Res. Soc. Proc., Vol. 356, pp. 385-390 (1995)  https://doi.org/10.1557/PROC-356-385

Ø      L. Doucet and G. Carlotti, "Elastic properties of silicate glass and spin-on glass thin films", Mater. Res. Soc. Proc., Vol 356, 215-220 (1995) https://doi.org/10.1557/PROC-356-215

 

Ø      G. Carlotti, G. Socino and L. Doucet, "Elastic properties of spin-on glass thin films", Appl. Phys. Lett. 66, 2682-2684 (1995) (file PDF, 104 KB)

Ø      G. Carlotti, D. Fioretto, G. Socino and E. Verona, "Brillouin Scattering determination of the whole set of elastic constants of a single transparent film of hexagonal symmetry", J. Phys. Cond. Matt. 7, 9147-9153 (1995) (file PDF, 292KB)

Ø      Hua Xia, G. Carlotti, G. Socino, K.J. Chen, Wei Zhang, Z.F. Li and X.K. Zhang, "Study of the Rayleigh acoustic mode in a-Si:H/a-SiNx:H superlattices", J. Appl. Phys. 75, 475-477 (1994) (file PDF, 430 KB)

Ø      G. Carlotti G. Socino, An Hu, Hua Xia and S.S. Jiang, "Enhancement of the shear elastic constant in periodic and quasiperiodic Ta/Al superlattices", J. Appl. Phys. 75, 3081-3084 (1994) (file PDF, 515 KB)

Ø      G. Carlotti G. Socino, Hua Xia, K.J. Chen, Z.F. Li, Wei Zhang and X.K. Zhang, "Elastic behavior of finite-stage quasiperiodic Fibonacci a-Si:H/a-Si1-xCx:H multilayers", J.Phys. Cond. Matt. 6, 6095-6102 (1994) (file PDF, 393KB)

Ø      G. Carlotti G. Socino, Hua Xia, Z.F. Li, Wei Zhang, X.X. Qu and X.K. Zhang, "Study of amorphous silicon nitride H films by Brillouin spectroscopy", Mater. Res. Soc. Proc.,Vol. 336, pp.183-187 (1994)  https://doi.org/10.1557/PROC-336-183

Ø      G. Carlotti G. Socino, Hua Xia , An Hu and S. S. Jiang, "Elastic properties of FeNi/Cu and FeNi/Nb metallic superlattices investigated by Brillouin light scattering", Mater. Res. Soc. Proc.,Vol. 343, pp. 567-572(1994) https://doi.org/10.1557/PROC-343-567

Ø      G. Carlotti, D. Fioretto, L. Giovannini, L. Palmieri, G. Socino, L. Verdini and E. Verona, "Rayleigh acoustic mode in aluminum nitride films",1994 IEEE Ultrasonics Symp. Proc., 457-460 (1994) (file PDF, 291 KB)  

 

1992-1993

Ø      H. Xia, X.K.Zhang, An Hu, S.S.Jiang, R.W.Peng, W. Zhang, D.Feng, G.Carlotti, D. Fioretto, G. Socino and L. Verdini, "Effective elastic constants and phonon spectrum in metallic Ta/Al quasiperiodic superlattices", Phys. Rev. B 47, 3890-3895 (1993) (file PDF, 1146 KB)  

Ø      G. Carlotti D. Fioretto, G. Socino, L. Verdini and V. Pelosin, "Effect of annealing on the elastic properties of Ag/Ni superlattices", J. Appl. Phys. 73, 3028-3034 (1993) (file PDF, 822 KB)

Ø      G. Carlotti, A. Montone, C. Petrillo and M. Vittori Antisari, "Relationship between structural properties and elastic anomalies in Ag/Ni superlattices", J. Phys. Cond. Matt.5, 4611-4622 (1993) (file PDF, 1839 KB)

Ø      D. Fioretto, G. Carlotti, L. Palmieri, G. Socino and L. Verdini and A. Livi "Structural relaxation in polymeric films studied by Brillouin light spectroscopy", Phys. Rev. B. 47,15286-15289 (1993). (file PDF, 760 KB)

Ø      V. Pelosin, B. Rodmacq, S.R. Texeira, J. Hillairet and G. Carlotti, "Thermomechanical behaviour of Ag/Ni multilayers and magnetoelastic effects", Mat. Res. Soc. Symp. Proc., Vol. 308, pp 701-706(1993). https://doi.org/10.1557/PROC-308-701    (PDF file, 922 KB)

Ø      G. Carlotti, D. Fioretto, L. Palmieri, G. Socino, V.I. Anisimkin and I.M. Kotelyanskii, "Elastic properties of SnO2 films", 1993 IEEE Ultrasonics Symp.Proc., pp. 811-813 (1993) (file PDF, 308 KB)

Ø      V. Pelosin, B. Rodmacq, J. Hillairet, G. Carlotti, D. Fioretto and G. Socino, "Elastic characterization of Ag/Ni superlattices", in Materials Science Forum, 119-121, edited by L.B. Magalas and S. Gorczyca (Trans Tech, Zurich, 1993) pp.359-364

Ø      G. Carlotti, D. Fioretto, L. Giovannini, G. Socino, V. Pelosin and B. Rodmacq, "Selective determination of the c11 elastic constant in Ag/Ni superlattices by Brillouin scattering", Solid State Comm. 81, 487-489 (1992) (file PDF,363KB)

Ø      G. Carlotti, D. Fioretto, L. Giovannini, F. Nizzoli, L. Palmieri, G. Socino, L. Verdini, "Brillouin scattering by pseudosurface acoustic modes on (111) GaAs",J. of Phys. Cond. Matt. 4, 257-262 (1992) (file PDf, 250 KB)

Ø      G. Carlotti, D. Fioretto, G. Socino, B. Rodmacq and V. Pelosin, "Interface effects and elastic constants of Ag/Ni superlattices studied by Brillouin scattering", J. Appl. Phys. 71, 4897-4902 (1992) (file PDF, 770 KB)

Ø      G. Carlotti, A. Montone, F. Sacchetti and M. Vittori Antisari, "TEM characterzation of Ag/Ni multilayers", Proc. of the10th European Congress on Electron Microscopy, Granada (Spain) Sept. 1992, pp. 235-236.  (PDF file, 1172 KB)

Ø      G.Carlotti, D. Fioretto, L. Palmieri, G. Socino, L. Verdini, H. Xia, An Hu, X.K.Zhang, "Surface phonons in periodic and Fibonacci Nb/Cu superlattices", Phys. Rev. B, 46, 12777-12779 (1992) (file PDF, 504 KB)

Ø      H. Xia, J.G. Jiang, W. Zhang, K.J. Chen, X.K. Zhang, G. Carlotti, D. Fioretto and G. Socino, "Elastic properties of a-Ge:H/Si and a-Ge:H/SiO2 heterostructures", Solid State Commun. 84, 987-989 (1992) (PDF file, 254 KB)

Ø      D. Fioretto, G. Carlotti, G. Socino, L. Palmieri, L. Verdini, C. Caliendo and E. Verona, "Absorption and velocity dispersion of acoustic waves in polybutylacrilate films",1992 IEEE Ultrasonics Symp. Proc.,925-928 (1992) (file PDF, 375 KB)  

Ø      G. Socino, G. Carlotti and D. Fioretto, "Brillouin light scattering by surface phonons in thin films and layered structures", Invited paper, Proc. of 14thInternational Conference on Acoustic, Bejing, September 1992, C4-6 (1992) (Invited paper)  (PDF file, 376 KB)

 

1990-1991

Ø      G.Carlotti, D.Fioretto, L.Palmieri, G.Socino, L.Verdini and E.Verona, "Brillouin scattering by surface acoustic modes for elastic characterization of ZnO films", IEEE Transaction on Ultrasonics, Ferroelectrics and Frequency Control, 38, 56-61 (1991) (file PDF, 667 KB)

Ø      G. Carlotti, D. Fioretto, L. Giovannini, G. Socino, B. Rodmacq and V. Pelosin, "Elastic characterization of supported and unsupported Ag/Ni superlattices by Brillouin scattering", 1991 IEEE Ultrasonics Symp. Proc., 1079-1082 (1991) (file PDF, 374 KB)

Ø      H. Xia, X.K.Zhang, K.J.Chen, G.X.Cheng, and D.Feng G.Socino, L.Palmieri, G.Carlotti, D.Fioretto and F.Nizzoli, "Surface Brillouin scattering in semiconductor Fibonacci multilayers", Phis. Rev. B 42, 11288-11294 (1990) (file PDF, 1323 KB)  

Ø      G.Carlotti D.Fioretto, G.Socino, L.Palmieri, A.Petri, E.Verona, "Surface acoustic waves in c-axis inclined ZnO films", 1990 IEEE Ultrasonics Symp. Proc., 449-453 (1990) (file PDF, 399 KB)  

 

1987-1989

Ø      G.Carlotti, G.Socino and E.Verona, "Investigation of elastic properties of ZnO films by Brillouin Scattering", J. Appl. Phys. 65, 1370-1372 (1989) (file PDF, 492 KB)

Ø      G.Carlotti D.Fioretto, L.Palmieri, G.Socino, L.Verdini, and E.Verona, "Brillouin scattering from surface phonons in ZnO films" 1989 IEEE Ultrasonics Symp. Proc., 1201-1205 (1989).

Ø      G.Carlotti, G.Socino and E.Verona, "Photoelastic characterization of ZnO films", 1988 IEEE Ultrasonics Simp. Proc., 427-430 (1988).(file PDF, 279 KB)  

Ø      G.Carlotti, G.Socino, A.Petri, E.Verona, "Acoustic investigation of the elastic properties of ZnO films", Appl. Phys. Lett. 51, 1889-1891 (1987). (file PDF, 524 KB)

Ø      G.Carlotti, G.Socino, A.Petri, E.Verona, "Elastic constants of sputtered ZnO films", 1987 IEEE Ultrasonics Symp. Proc., 295-299 (1987).